Wireless Piezoelectric Motor Drive

Nanopositioners with embedded piezoelectric motors are used in a variety of industries, from microscopy to laser processing or measurement systems. A concrete example would be fine-tuning multiple mirror lens units system. After fine adjustment lens, its position is expected maintained when the system not energized. Features such as small size, direct drive, and maintaining high rigidity at power off make inertia-type suitable for “set go”-type applications. However, wiring dedicated control electronics each positioner can increase complexity. In this study, wireless driving method introduced first time, best our knowledge. approach, sawtooth signals two-phase inertia motor converted into two complementary pulse-width-modulated (PWM) 1.0 MHz amplified by class-D amplifier topology, which GaN transistors implemented. The PWM applied transmitter coil. receiver coil, forms an LC network capacitances multilayer actuators, picks up signals. filtered voltage waveform coil modified signal, operate wirelessly. Initial measurements revealed that even single pulse transmitted precise movements slider obtained. Mean step sizes drive 140 nm one direction 125 reverse direction.